Pure Chemicals

The following listings summarise our main pure chemicals and grades. However, we aim to develop products with our customers to suit each process situation with precision.

OM Group has developed a suitable range of specified product grades and dilutions for the various levels of device technologies. The table below summarises the grades available for typical user technology:

CHEMICAL GRADE	Customer application. Linewidths in microns	Metallic Impurities Spec per element
SS - ULSI	<0.3 - 0.5	0. 1 ppb
S - ULSI	0.5 - 0.8	1 ppb
ULSI	>0.8	10 ppb
VLSI	>1.0	10 - 100 ppb
MOS	>1.0	>100 ppb

Ranges of mixed acid echants and many other electronics chemicals are listed under the Speciality mixtures and Nanostrip tabs and detials of packaging sizes, methods and systems are given under the Packaging Systems tab.

Specification conventions

Particle specifications are quoted at 0.2, 0.3 and 0.5 micron size for SS - ULSI and S - ULSI Grades.

For all ULSI and electronic grades (MOS-VLSI) particle specs are quoted at 0.5 micron.

SS - ULSI product purities are available in critical cleaning chemicals: Hydrogen Peroxide; Isopropyl Alcohol; Hydrofluoric Acid; Ammonium Hydroxide; and Hydrochloric Acid.

Acids

Sulphuric Acid; Hydrochloric Acid

Phosphoric Acid; Nitric Acid

Acetic Acid; Ammonium Flouride

Hydrofluoric Acid

Dilute Hydrofluoric Acid - see also Speciality mixtures tab

Bases

Ammonium Hydroxide

Sodium Hydroxide

Potassium Hydroxide

Mixtures

BOEs; silicon etchants; edge bead removers; Nanostrip and other speciality mixtures: see Speciality mixtures or Nanostriptabs.

Solvents

Iso propyl Alcohol (2 propanol)

Acetone

N-ButylAcetate

Hexamethyldisilazane (HMDS)

Methanol

n-Methyl-2- Pyrrolidone

For other solvents see Speciality mixtures tab.

Oxidising agents

Hydrogen Peroxide

Photo resist developers (PRD)

See Speciality mixtures tab.